BibTeX record conf/nems/QianHSYY11

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@inproceedings{DBLP:conf/nems/QianHSYY11,
  author       = {Liang Qian and
                  P. Z. Hong and
                  Lina Sun and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {{CMOS} compatible process for suspended high-aspect-ratio integrated
                  silicon microstructures},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {397--400},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017376},
  doi          = {10.1109/NEMS.2011.6017376},
  timestamp    = {Tue, 13 Feb 2024 20:46:01 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/QianHSYY11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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