BibTeX record conf/nems/SoulimanePBJBDP13

• > Home > conf/nems/SoulimanePBJBDP13

@inproceedings{DBLP:conf/nems/SoulimanePBJBDP13,
  author       = {Sofiane Soulimane and
                  Arnaud Pouydebasque and
                  S{\'{e}}bastien Bolis and
                  Fabrice Jacquet and
                  Claudine Bridoux and
                  Florian Dupont and
                  Christophe Poulain and
                  St{\'{e}}phane Moreau and
                  Stephane Fanget},
  title        = {A new experimental methodology using point deflection to quantify
                  residual stress of thin polymer membrane materials in {MEMS} devices},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {486--489},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559776},
  doi          = {10.1109/NEMS.2013.6559776},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/SoulimanePBJBDP13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}