BibTeX record conf/nems/WenZXWC09

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@inproceedings{DBLP:conf/nems/WenZXWC09,
  author       = {Li Wen and
                  Qiuping Zhang and
                  Weiwei Xiang and
                  Hai Wang and
                  Jiaru Chu},
  title        = {Design and fabrication of the microplasma reactor for maskless scanning
                  plasma etching},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {577--580},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068646},
  doi          = {10.1109/NEMS.2009.5068646},
  timestamp    = {Thu, 23 Mar 2023 23:58:03 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WenZXWC09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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