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BibTeX record conf/vlsi-dat/Chang14
@inproceedings{DBLP:conf/vlsi-dat/Chang14, author = {Mei Chang}, title = {Precision material engineering - An equipment point of view}, booktitle = {Technical Papers of 2014 International Symposium on {VLSI} Design, Automation and Test, {VLSI-DAT} 2014, Hsinchu, Taiwan, April 28-30, 2014}, pages = {1--3}, publisher = {{IEEE}}, year = {2014}, url = {https://doi.org/10.1109/VLSI-DAT.2014.6834926}, doi = {10.1109/VLSI-DAT.2014.6834926}, timestamp = {Wed, 16 Oct 2019 14:14:54 +0200}, biburl = {https://dblp.org/rec/conf/vlsi-dat/Chang14.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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