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BibTeX record journals/eswa/KimKC09
@article{DBLP:journals/eswa/KimKC09, author = {Byungwhan Kim and Jeong Kim and Seongjin Choi}, title = {Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment}, journal = {Expert Syst. Appl.}, volume = {36}, number = {8}, pages = {11347--11351}, year = {2009}, url = {https://doi.org/10.1016/j.eswa.2009.03.004}, doi = {10.1016/J.ESWA.2009.03.004}, timestamp = {Fri, 26 May 2017 22:54:16 +0200}, biburl = {https://dblp.org/rec/journals/eswa/KimKC09.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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