BibTeX record journals/ibmrd/GusevNF06

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@article{DBLP:journals/ibmrd/GusevNF06,
  author       = {Evgeni P. Gusev and
                  Vijay Narayanan and
                  Martin M. Frank},
  title        = {Advanced high-k dielectric stacks with polySi and metal gates: Recent
                  progress and current challenges},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {50},
  number       = {4-5},
  pages        = {387--410},
  year         = {2006},
  url          = {https://doi.org/10.1147/rd.504.0387},
  doi          = {10.1147/RD.504.0387},
  timestamp    = {Sat, 30 Sep 2023 10:14:08 +0200},
  biburl       = {https://dblp.org/rec/journals/ibmrd/GusevNF06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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