BibTeX record journals/ieicet/HanO13

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@article{DBLP:journals/ieicet/HanO13,
  author       = {Dae{-}Hee Han and
                  Shun'ichiro Ohmi},
  title        = {Flattening Process of Si Surface below 1000{\textdegree}C Utilizing
                  Ar/4.9{\%}H\({}_{\mbox{2}}\) Annealing and Its Effect on Ultrathin
                  HfON Gate Insulator Formation},
  journal      = {{IEICE} Trans. Electron.},
  volume       = {96-C},
  number       = {5},
  pages        = {669--673},
  year         = {2013},
  url          = {https://doi.org/10.1587/transele.E96.C.669},
  doi          = {10.1587/TRANSELE.E96.C.669},
  timestamp    = {Sat, 11 Apr 2020 14:48:10 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicet/HanO13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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