BibTeX record journals/jrm/SeoKO06

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@article{DBLP:journals/jrm/SeoKO06,
  author       = {Manseung Seo and
                  Haeryung Kim and
                  Masahiko Onosato},
  title        = {Lithography Using a Microelectronic Mask},
  journal      = {J. Robotics Mechatronics},
  volume       = {18},
  number       = {6},
  pages        = {816--823},
  year         = {2006},
  url          = {https://doi.org/10.20965/jrm.2006.p0816},
  doi          = {10.20965/JRM.2006.P0816},
  timestamp    = {Wed, 01 Apr 2020 08:51:41 +0200},
  biburl       = {https://dblp.org/rec/journals/jrm/SeoKO06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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