BibTeX record journals/jzusc/HanFLLL13

download as .bib file

@article{DBLP:journals/jzusc/HanFLLL13,
  author       = {Jianqiang Han and
                  Ri{-}sheng Feng and
                  Yan Li and
                  Sen{-}lin Li and
                  Qing Li},
  title        = {Microfabrication technology for non-coplanar resonant beams and crab-leg
                  supporting beams of dual-axis bulk micromachined resonant accelerometers},
  journal      = {J. Zhejiang Univ. Sci. {C}},
  volume       = {14},
  number       = {1},
  pages        = {65--74},
  year         = {2013},
  url          = {https://doi.org/10.1631/jzus.C1200251},
  doi          = {10.1631/JZUS.C1200251},
  timestamp    = {Wed, 13 May 2020 17:18:43 +0200},
  biburl       = {https://dblp.org/rec/journals/jzusc/HanFLLL13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics