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BibTeX record journals/jzusc/HanFLLL13
@article{DBLP:journals/jzusc/HanFLLL13, author = {Jianqiang Han and Ri{-}sheng Feng and Yan Li and Sen{-}lin Li and Qing Li}, title = {Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers}, journal = {J. Zhejiang Univ. Sci. {C}}, volume = {14}, number = {1}, pages = {65--74}, year = {2013}, url = {https://doi.org/10.1631/jzus.C1200251}, doi = {10.1631/JZUS.C1200251}, timestamp = {Wed, 13 May 2020 17:18:43 +0200}, biburl = {https://dblp.org/rec/journals/jzusc/HanFLLL13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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