BibTeX record journals/jzusc/LiSWW13

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@article{DBLP:journals/jzusc/LiSWW13,
  author       = {Dong{-}ling Li and
                  Zheng{-}guo Shang and
                  Sheng{-}qiang Wang and
                  Zhi{-}yu Wen},
  title        = {Low temperature Si/Si wafer direct bonding using a plasma activated
                  method},
  journal      = {J. Zhejiang Univ. Sci. {C}},
  volume       = {14},
  number       = {4},
  pages        = {244--251},
  year         = {2013},
  url          = {https://doi.org/10.1631/jzus.C12MNT02},
  doi          = {10.1631/JZUS.C12MNT02},
  timestamp    = {Wed, 13 May 2020 17:18:37 +0200},
  biburl       = {https://dblp.org/rec/journals/jzusc/LiSWW13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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