BibTeX record journals/micromachines/FrankHPR15

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@article{DBLP:journals/micromachines/FrankHPR15,
  author       = {Philipp Frank and
                  Sebastian Haefner and
                  Georgi Paschew and
                  Andreas Richter},
  title        = {Rounding of Negative Dry Film Resist by Diffusive Backside Exposure
                  Creating Rounded Channels for Pneumatic Membrane Valves},
  journal      = {Micromachines},
  volume       = {6},
  number       = {11},
  pages        = {1588--1596},
  year         = {2015},
  url          = {https://doi.org/10.3390/mi6111442},
  doi          = {10.3390/MI6111442},
  timestamp    = {Sun, 25 Jul 2021 11:39:13 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/FrankHPR15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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