BibTeX record journals/micromachines/YangSHZMZN15

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@article{DBLP:journals/micromachines/YangSHZMZN15,
  author       = {Jian Yang and
                  Chaowei Si and
                  Guowei Han and
                  Meng Zhang and
                  Liuhong Ma and
                  Yongmei Zhao and
                  Jin Ning},
  title        = {Researching the Aluminum Nitride Etching Process for Application in
                  {MEMS} Resonators},
  journal      = {Micromachines},
  volume       = {6},
  number       = {2},
  pages        = {281--290},
  year         = {2015},
  url          = {https://doi.org/10.3390/mi6020281},
  doi          = {10.3390/MI6020281},
  timestamp    = {Sat, 19 Oct 2019 19:23:10 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/YangSHZMZN15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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