BibTeX record journals/mj/GhaffariANWK13

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@article{DBLP:journals/mj/GhaffariANWK13,
  author    = {Shirin Ghaffari and
               Chae H. Ahn and
               Eldwin J. Ng and
               Shasha Wang and
               Thomas W. Kenny},
  title     = {Crystallographic effects in modeling fundamental behavior of {MEMS}
               silicon resonators},
  journal   = {Microelectronics Journal},
  volume    = {44},
  number    = {7},
  pages     = {586--591},
  year      = {2013},
  url       = {https://doi.org/10.1016/j.mejo.2013.03.010},
  doi       = {10.1016/j.mejo.2013.03.010},
  timestamp = {Sun, 28 May 2017 13:20:21 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/mj/GhaffariANWK13},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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