BibTeX record journals/mr/FujiedaMSTY05

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@article{DBLP:journals/mr/FujiedaMSTY05,
  author       = {Shinji Fujieda and
                  Yoshinao Miura and
                  Motofumi Saitoh and
                  Yuden Teraoka and
                  Akitaka Yoshigoe},
  title        = {Characterization of interface defects related to negative-bias temperature
                  instability in ultrathin plasma-nitrided SiON/Si{\textless}1 0 0{\textgreater}
                  systems},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {1},
  pages        = {57--64},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2004.02.017},
  doi          = {10.1016/J.MICROREL.2004.02.017},
  timestamp    = {Sat, 22 Feb 2020 19:29:29 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/FujiedaMSTY05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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