BibTeX record journals/mr/LembergerPZBFR05

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@article{DBLP:journals/mr/LembergerPZBFR05,
  author       = {Martin Lemberger and
                  Albena Paskaleva and
                  Stefan Z{\"{u}}rcher and
                  Anton J. Bauer and
                  Lothar Frey and
                  Heiner Ryssel},
  title        = {Electrical properties of hafnium silicate films obtained from a single-source
                  {MOCVD} precursor},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {5-6},
  pages        = {819--822},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2004.11.040},
  doi          = {10.1016/J.MICROREL.2004.11.040},
  timestamp    = {Mon, 26 Oct 2020 08:59:24 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/LembergerPZBFR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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