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BibTeX record journals/mr/LembergerPZBFR05
@article{DBLP:journals/mr/LembergerPZBFR05, author = {Martin Lemberger and Albena Paskaleva and Stefan Z{\"{u}}rcher and Anton J. Bauer and Lothar Frey and Heiner Ryssel}, title = {Electrical properties of hafnium silicate films obtained from a single-source {MOCVD} precursor}, journal = {Microelectron. Reliab.}, volume = {45}, number = {5-6}, pages = {819--822}, year = {2005}, url = {https://doi.org/10.1016/j.microrel.2004.11.040}, doi = {10.1016/J.MICROREL.2004.11.040}, timestamp = {Mon, 26 Oct 2020 08:59:24 +0100}, biburl = {https://dblp.org/rec/journals/mr/LembergerPZBFR05.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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