BibTeX record journals/sensors/ZhaoSZZQLLT18

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@article{DBLP:journals/sensors/ZhaoSZZQLLT18,
  author    = {Bo Zhao and
               Weijia Shi and
               Jiawei Zhang and
               Ming Zhang and
               Xue Qi and
               Jiaxin Li and
               Feng Li and
               Jiubin Tan},
  title     = {Six Degrees of Freedom Displacement Measurement System for Wafer Stage
               Composed of Hall Sensors},
  journal   = {Sensors},
  volume    = {18},
  number    = {7},
  pages     = {2030},
  year      = {2018},
  url       = {https://doi.org/10.3390/s18072030},
  doi       = {10.3390/s18072030},
  timestamp = {Mon, 29 Jul 2019 15:59:37 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/sensors/ZhaoSZZQLLT18},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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