BibTeX record journals/tcst/OomenHQWBS14

download as .bib file

@article{DBLP:journals/tcst/OomenHQWBS14,
  author       = {Tom Oomen and
                  Robbert van Herpen and
                  Sander Quist and
                  Marc M. J. van de Wal and
                  Okko H. Bosgra and
                  Maarten Steinbuch},
  title        = {Connecting System Identification and Robust Control for Next-Generation
                  Motion Control of a Wafer Stage},
  journal      = {{IEEE} Trans. Control. Syst. Technol.},
  volume       = {22},
  number       = {1},
  pages        = {102--118},
  year         = {2014},
  url          = {https://doi.org/10.1109/TCST.2013.2245668},
  doi          = {10.1109/TCST.2013.2245668},
  timestamp    = {Mon, 08 Jun 2020 22:19:59 +0200},
  biburl       = {https://dblp.org/rec/journals/tcst/OomenHQWBS14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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