BibTeX record journals/tcst/OomenHQWBS14

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@article{DBLP:journals/tcst/OomenHQWBS14,
  author    = {Tom Oomen and
               Robbert van Herpen and
               Sander Quist and
               Marc M. J. van de Wal and
               Okko H. Bosgra and
               Maarten Steinbuch},
  title     = {Connecting System Identification and Robust Control for Next-Generation
               Motion Control of a Wafer Stage},
  journal   = {{IEEE} Trans. Contr. Sys. Techn.},
  volume    = {22},
  number    = {1},
  pages     = {102--118},
  year      = {2014},
  url       = {https://doi.org/10.1109/TCST.2013.2245668},
  doi       = {10.1109/TCST.2013.2245668},
  timestamp = {Fri, 12 Jul 2019 15:55:13 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/tcst/OomenHQWBS14},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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