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"Towards a Complete Direct Hybrid Bonding D2W Integration Flow: ..."
Emilie Bourjot et al. (2019)
- Emilie Bourjot, Paul Stewart, Christophe Dubarry
, E. Lagoutte, E. Rolland, Nicolas Bresson, G. Romano, D. Scevola, Viorel Balan, Jérôme Dechamp, Marc Zussy, Gaëlle Mauguen, Clément Castan, Loïc Sanchez, Amadine Jouve, Frank Fournel
, Séverine Cheramy:
Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. 3DIC 2019: 1-5

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