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"High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer."

C. Roda Neve et al. (2016)

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DOI: 10.1109/3DIC.2016.7970024

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/3dic/NeveDNLVPBB16
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  - https://dblp.org/rec/conf/3dic/NeveDNLVPBB16
C. Roda Neve, Mikael Detalle, Philip Nolmans, Yunlong Li, Joeri De Vos, Geert Van der Plas, Gerald Beyer, Eric Beyne:
High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer. 3DIC 2016: 1-4

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