"SrTiO3 thin film decoupling capacitors on Si interposers for 3D system ..."

Koichi Takemura et al. (2009)

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DOI: 10.1109/3DIC.2009.5306572

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Koichi Takemura, Katsuya Kikuchi, Chihiro Ueda, Kazuhiro Baba, Masahiro Aoyagi, Kanji Otsuka:
SrTiO3 thin film decoupling capacitors on Si interposers for 3D system integration. 3DIC 2009: 1-5

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