"Extended range of a MEMS electrostatic actuator using an adjustable linear ..."

Hatem Samaali, Fehmi Najar (2021)

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DOI: 10.1109/SSD52085.2021.9429485

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Hatem Samaali, Fehmi Najar:
Extended range of a MEMS electrostatic actuator using an adjustable linear controller. SSD 2021: 1166-1171

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