"A General Framework for State Estimation in High-Mix Semiconductor ..."

Jin Wang, Q. Peter He, Thomas F. Edgar (2007)

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DOI: 10.1109/ACC.2007.4282987

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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Jin Wang, Q. Peter He, Thomas F. Edgar:
A General Framework for State Estimation in High-Mix Semiconductor Manufacturing. ACC 2007: 3636-3641

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