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"Design, modeling, and characterization of an XY nanopositioning stage ..."

Andrew J. Fleming, Garth Berriman, Yuen Kuan Yong (2016)

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DOI: 10.1109/AIM.2016.7576955

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-25

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Andrew J. Fleming, Garth Berriman, Yuen Kuan Yong:
Design, modeling, and characterization of an XY nanopositioning stage constructed from a single sheet of piezoelectric material. AIM 2016: 1333-1338

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