"AFM image based pattern detection for adaptive drift compensation and ..."

Sergey Belikov, Jian Shi, Chanmin Su (2008)

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DOI: 10.1109/ACC.2008.4586794

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-09

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Sergey Belikov, Jian Shi, Chanmin Su:
AFM image based pattern detection for adaptive drift compensation and positioning at the nanometer scale. ACC 2008: 2046-2051

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