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"Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated ..."

Youngshin Han et al. (2004)

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DOI: 10.1007/978-3-540-30585-9_57

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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  dblp key:
  - conf/asiasim/HanPCL04
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  - https://dblp.org/rec/conf/asiasim/HanPCL04
Youngshin Han, Dongsik Park, Sangwon Chae, Chilgee Lee:
Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems). AsiaSim 2004: 514-520

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