"OpenILT: An Open Source Inverse Lithography Technique Framework (Invited ..."

Su Zheng, Bei Yu, Martin D. F. Wong (2023)

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DOI: 10.1109/ASICON58565.2023.10396314

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-16

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Su Zheng, Bei Yu, Martin D. F. Wong:
OpenILT: An Open Source Inverse Lithography Technique Framework (Invited Paper). ASICON 2023: 1-4

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