"K-Wafer Cyclic Sequence for Scheduling of Dual-Armed Cluster Tool with ..."

Sanghyun Joo, Hyun-Jung Kim (2025)

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DOI: 10.1109/CASE58245.2025.11163980

access: closed

type: Conference or Workshop Paper

metadata version: 2025-09-30

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Sanghyun Joo, Hyun-Jung Kim:
K-Wafer Cyclic Sequence for Scheduling of Dual-Armed Cluster Tool with Purge Operation. CASE 2025: 1611-1616

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