"A Hybrid Modelling Approach for Parameter Estimation of Analytical ..."

Simon Kamm et al. (2021)

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DOI: 10.1109/CASE49439.2021.9551454

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-08

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Simon Kamm, Kanuj Sharma, Nasser Jazdi, Michael Weyrich:
A Hybrid Modelling Approach for Parameter Estimation of Analytical Reflection Models in the Failure Analysis Process of Semiconductors. CASE 2021: 417-422

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