"Simulation-based Performance Assessment of Tool Requalification Strategies ..."

Denny Kopp et al. (2018)

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DOI: 10.1109/COASE.2018.8560476

access: closed

type: Conference or Workshop Paper

metadata version: 2018-12-10

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Denny Kopp, Lars Mönch, Detlef Pabst, Marcel Stehli:
Simulation-based Performance Assessment of Tool Requalification Strategies in Wafer Fabs. CASE 2018: 638-641

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