"Performance evaluation of deterministic flow lines: Redundant modules and ..."

Kyungsu Park, James R. Morrison (2010)

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DOI: 10.1109/COASE.2010.5584593

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Kyungsu Park, James R. Morrison:
Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment. CASE 2010: 45-50

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