"A novel ontology-based knowledge engineering approach for yield symptom ..."

Fang-Hsiang Su et al. (2009)

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DOI: 10.1109/COASE.2009.5234086

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

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Fang-Hsiang Su, Shi-Chung Chang, Chih-Min Fan, Ya-Jung Tsai, J. Jheng, Ching-Pin Kao, Chun-Yao Lu:
A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing. CASE 2009: 433-438

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