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"Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm ..."

Jufeng Wang et al. (2023)

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DOI: 10.1109/CASE56687.2023.10260548

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-05

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Jufeng Wang, Tingting Leng, Chunfeng Liu, MengChu Zhou:
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time. CASE 2023: 1-6

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