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"Calibration of Wafer Handling Robots: A Fixturing Approach."

Mike Tao Zhang, Ken Goldberg (2007)

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DOI: 10.1109/COASE.2007.4341769

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-14

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Mike Tao Zhang, Ken Goldberg:
Calibration of Wafer Handling Robots: A Fixturing Approach. CASE 2007: 255-260

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