"Characterization and fabrication of SiOx nano-metric films, obtained by ..."

J. Alarcon-Salazar et al. (2012)

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DOI: 10.1109/ICEEE.2012.6421157

access: closed

type: Conference or Workshop Paper

metadata version: 2020-11-04

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J. Alarcon-Salazar, Mariano Aceves-Mijares, S. Roman-Lopez, Ciro Falcony:
Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering. CCE 2012: 1-5

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