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"Characterization and Control of a Piezoelectrically Actuated High-speed ..."

Erfan Khodabakhshi et al. (2022)

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DOI: 10.1109/CCTA49430.2022.9966105

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Erfan Khodabakhshi, Nastaran Nikooienejad, Mohammad Maroufi, S. O. Reza Moheimani:
Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner^*. CCTA 2022: 1313-1318

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