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"Simultaneous regulation of film thickness, surface roughness and porosity ..."

Gangshi Hu et al. (2009)

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DOI: 10.1109/CDC.2009.5399542

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Gangshi Hu, Xinyu Zhang, Gerassimos Orkoulas, Panagiotis D. Christofides:
Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process. CDC 2009: 2387-2394

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