"Systematic synthesis of nano- and micro-electromechanical systems."

Sergey Edward Lyshevski, Marina Alexandra Lyshevski (2001)

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DOI: 10.1109/.2001.980138

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-06

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Sergey Edward Lyshevski, Marina Alexandra Lyshevski:
Systematic synthesis of nano- and micro-electromechanical systems. CDC 2001: 425-430

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