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"CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems."
Jaesik Lee et al. (2007)
- Jaesik Lee, Joseph Weiner, Hsin-Hung Chen, Yves Baeyens, Vladimir Aksyuk
, Young-Kai Chen:
CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems. CICC 2007: 401-404
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