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"Modeling of resistance in FinFET local interconnect."

Ning Lu, Pooja M. Kotecha, Richard A. Wachnik (2014)

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DOI: 10.1109/CICC.2014.6946027

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Ning Lu, Pooja M. Kotecha, Richard A. Wachnik:
Modeling of resistance in FinFET local interconnect. CICC 2014: 1-4

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