"Simulation and Analysis of Spring Based Transverse Axis Sensing MEMS ..."

Sarvesh Sonkar et al. (2020)

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DOI: 10.1109/CODIT49905.2020.9263904

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Sarvesh Sonkar, Prashant Kumar, Deepu Philip, Ajoy Kanti Ghosh:
Simulation and Analysis of Spring Based Transverse Axis Sensing MEMS Capacitive Accelerometer. CoDIT 2020: 1018-1023

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