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"Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate ..."
Lars Liebmann et al. (2001)
- Lars Liebmann, Jennifer Lund, Fook-Luen Heng, Ioana Graur:
Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking. DAC 2001: 79-84
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