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"Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and ..."

Yifeng Xiao et al. (2021)

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DOI: 10.1109/DAC18074.2021.9586273

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-12

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  dblp key:
  - conf/dac/XiaoSYCY021
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  - https://dblp.org/rec/conf/dac/XiaoSYCY021
Yifeng Xiao, Miaodi Su, Haoyu Yang, Jianli Chen, Jun Yu, Bei Yu:
Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration. DAC 2021: 907-912

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