"A Multifunctional Laser Linking and Cutting Structure for Standard 0.25 ..."

Ole Mende et al. (2000)

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DOI: 10.1109/DFTVS.2000.887149

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Ole Mende, Michael Redeker, Markus Rudack, Dieter Treytnar:
A Multifunctional Laser Linking and Cutting Structure for Standard 0.25 mum CMOS-Technology. DFT 2000: 114-

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