"Development of high sensitivity CMOS-MEMS inertia sensor and its ..."

Kazuya Masu et al. (2016)

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DOI: 10.1109/ESSCIRC.2016.7598252

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake:
Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease. ESSCIRC 2016: 99-104

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