"CMOS-compatible SOI micro-hotplate-based oxygen sensor."

Viorel Avramescu et al. (2016)

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DOI: 10.1109/ESSDERC.2016.7599640

access: closed

type: Conference or Workshop Paper

metadata version: 2025-12-07

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Viorel Avramescu, Andrea De Luca, Mihai Brezeanu, Syed Zeeshan Ali, Florin Udrea, Octavian Buiu, Cornel Cobianu, Bogdan-Catalin Serban, Julian W. Gardner, Viorel Dumitru, Alisa Stratulat:
CMOS-compatible SOI micro-hotplate-based oxygen sensor. ESSDERC 2016: 280-283

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