"PPAC scaling enablement for 5nm mobile SoC technology."

Mustafa Badaroglu et al. (2017)

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DOI: 10.1109/ESSDERC.2017.8066636

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-31

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Mustafa Badaroglu, Jeff Xu, John Zhu, Da Yang, Jerry Bao, Seung Chul Song, Peijie Feng, Romain Ritzenthaler, Hans Mertens, Geert Eneman, Naoto Horiguchi, Jeffrey Smith, Suman Datta, David Kohen, Po-Wen Chan, Keagan Chen, P. R. Chidi Chidambaram:
PPAC scaling enablement for 5nm mobile SoC technology. ESSDERC 2017: 240-243

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