"Performance and layout effects of SiGe channel in 14nm UTBB FDSOI: ..."

R. Berthelon et al. (2016)

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DOI: 10.1109/ESSDERC.2016.7599604

access: closed

type: Conference or Workshop Paper

metadata version: 2019-07-10

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R. Berthelon, François Andrieu, P. Perreau, E. Baylac, A. Pofelski, Emmanuel Josse, Didier Dutartre, A. Claverie, Michel Haond:
Performance and layout effects of SiGe channel in 14nm UTBB FDSOI: SiGe-first vs. SiGe-last integration. ESSDERC 2016: 127-130

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