"Impact of etch stop layer on negative bias illumination stress of ..."

Ajay Bhoolokam et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948820

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Ajay Bhoolokam, Manoj Nag, Adrian Vaisman Chasin, Soeren Steudel, Jan Genoe, Gerwin H. Gelinck, Guido Groeseneken, Paul Heremans:
Impact of etch stop layer on negative bias illumination stress of amorphous Indium Gallium Zinc Oxide transistors. ESSDERC 2014: 302-304

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