BibTeX record conf/essderc/BisiMSCPNLZM13

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@inproceedings{DBLP:conf/essderc/BisiMSCPNLZM13,
  author    = {Davide Bisi and
               Matteo Meneghini and
               Antonio Stocco and
               Giulia Cibin and
               Alessio Pantellini and
               Antonio Nanni and
               Claudio Lanzieri and
               Enrico Zanoni and
               Gaudenzio Meneghesso},
  title     = {Influence of fluorine-based dry etching on electrical parameters of
               AlGaN/GaN-on-Si High Electron Mobility Transistors},
  booktitle = {Proceedings of the European Solid-State Device Research Conference,
               {ESSDERC} 2013, Bucharest, Romania, September 16-20, 2013},
  pages     = {61--64},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/ESSDERC.2013.6818819},
  doi       = {10.1109/ESSDERC.2013.6818819},
  timestamp = {Wed, 05 May 2021 08:50:07 +0200},
  biburl    = {https://dblp.org/rec/conf/essderc/BisiMSCPNLZM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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