"Experimental extraction of BEOL composite equivalent thermal ..."

Erik Bury et al. (2018)

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DOI: 10.1109/ESSDERC.2018.8486872

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-09

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Erik Bury, Ben Kaczer, Simon Van Beek, Dimitri Linten:
Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations. ESSDERC 2018: 186-189

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